AFSEM® — AFM in-situ SEM

Two microscopes are better than one
GETec Microscopy offers innovative Atomic Force Microscopy solutions for seamless integration into existing host systems like Scanning Electron Microscopes. In partnership with our customers, we develop dedicated nano analysis tools based on pre-engineered modules.
AFSEM® is an AFM by GETec Microscopy, designed for integration into an SEM or Dualbeam (SEM/FIB) microscope. It’s open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The complimentary image data of AFM and SEM enable unique characterization of your sample.
What is your Application?
Latest News
2020, August 5: AFSEM talk at M&M 2020
Make sure to attend Chris Schwalb's talk at this year's M&M virtual meeting. The presentation will focus on in-situ correlative analysis of mechanical and electrical properties and take place on August 5th at 2 pm (US Central Time, Presentation N°: 701).
2020, May 20: Quantum Design and Angstrom Scientific Webinar
Register for our webinar on characterization of conductive and magnetic nanostructures by correlative in-situ AFM and SEM via the link below! Register now....
2020, April: New AFSEM Publication: Nanostructuring of Copper Surface
Make sure to check out the latest AFSEM paper! Its topic is coloration of a copper surface by nanostructuring with femtosecond laser pulses. The AFM measurements were performed with the AFSEM at USTEM in Vienna. Read more...
2020, April: New AFSEM Paper: Correlative AFM and HIM
Have you read the latest AFSEM paper? It tells you all about how our AFSEM was integrated into a Helium Ion Microscopy and which interesting experiment was made possible by this unique setup. Read more...
AFSEM® users about our product…
“Constantly, applications and challenges arise for which the AFSEM is not only practical, but essential. That starts with direct correlation of specific particles or structures and ends with vacuum conditions as prerequisite, such as thermal measurements. Furthermore, the AFSEM accelerates the work-flow and therefore increases the efficiency for many studies.”
“The high spatial resolution of AFSEM, especially in Z direction, strongly stretched the application of our SEM. Combined with the high angle resolution of EBSD, the AFSEM becomes a powerful tool for the research of phase transformation.”
“What was really convincing to us is the huge versatility of this combination of an Atomic Force Microscope with our excellent optical microscope for our challenging materials and problems. We simply can use real life specimen without big preparation.”
“AFSEM® not only extends the resolution of our microscopes by an order of magnitude, it extends our measurement capabilities beyond topography concerning material composition.”
“Thanks to the AFSEM we can now perform in situ investigations in our FIB microscope, which were not possible before. Especially the possibility to immediately control the result of your nanofabrication experiment is a real benefit!”