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AFSEM® — AFM in-situ SEM

Two microscopes are better than one

GETec Microscopy offers innovative Atomic Force Microscopy solutions for seamless integration into existing host systems like Scanning Electron Microscopes. In partnership with our customers, we develop dedicated nano analysis tools based on pre-engineered modules.

AFSEM® is an AFM by GETec Microscopy, designed for integration into an SEM or Dualbeam (SEM/FIB) microscope. It’s open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The complimentary image data of AFM and SEM enable unique characterization of your sample.

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What is your Application?

Latest News

2019, May 6th-7th: FIB SEM user group meeting at Washington, D.C.

GETec will be present at the FIB SEM User Group Meeting 2019 between the 6th and 7th of May at George Washington University in Washington, DC. On May 7th at 9:15 am GETec's Chris Schwalb will be giving a presentation on In-Situ Correlative AFM/SEM/FIB analysis of ion-beam treated samples. Please visit us at the Quantum Design booth to talk more [...]

2019, April 25th-26th: ASEM workshop in Graz, Austria

Meet GETec at the ASEM workshop. GETec's Chris Schwalb will be giving a talk on April 26th at 10am. The presentation wil be focusing on the topic of correlative in-situ analysis by combination of AFM, SEM and FIB. Furthermore we would be happy to use this opportunity to discuss with you, how such an analysis can benefit your application. Find [...]

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AFSEM® users about our product…

“Constantly, applications and challenges arise for which the AFSEM is not only practical, but essential. That starts with direct correlation of specific particles or structures and ends with vacuum conditions as prerequisite, such as thermal measurements. Furthermore, the AFSEM accelerates the work-flow and therefore increases the efficiency for many studies.”

Assistant Professor Dr. Harald Plank, University of Technology Graz

The high spatial resolution of AFSEM, especially in Z direction, strongly stretched the application of our SEM. Combined with the high angle resolution of EBSD, the AFSEM becomes a powerful tool for the research of phase transformation.”

“What was really convincing to us is the huge versatility of this combination of an Atomic Force Microscope with our excellent optical microscope for our challenging materials and problems. We simply can use real life specimen without big preparation.”

DI Herfried Lammer, Wood K plus
olivia moser

“AFSEM® not only extends the resolution of our microscopes by an order of magnitude, it extends our measurement capabilities beyond topography concerning material composition.”

Dr. Olivia Moser, Wood K plus

“Thanks to the AFSEM we can now perform in situ investigations in our FIB microscope, which were not possible before. Especially the possibility to immediately control the result of your nanofabrication experiment is a real benefit!”

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