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AFSEM® — AFM in-situ SEM

Two microscopes are better than one

GETec Microscopy offers innovative Atomic Force Microscopy solutions for seamless integration into existing host systems like Scanning Electron Microscopes. In partnership with our customers, we develop dedicated nano analysis tools based on pre-engineered modules.

AFSEM® is an AFM by GETec Microscopy, designed for integration into an SEM or Dualbeam (SEM/FIB) microscope. It’s open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The complimentary image data of AFM and SEM enable unique characterization of your sample.

Learn more about AFSEM®

What is your Application?

Latest News

2019, March: Article in Spectrum Magazine

Spectrum, a specialist journal published by Quantum Design LOT Germany featured AFSEM® in the march issue. The second article in this series focuses on the use of AFSEM® for high resolution conductivity measurements. Until now, the limiting factor for this standard AFM measurement modes, has been the larger radius of the specially coated, conductive cantilever tips compared with normal, uncoated [...]

2018, October 10-12: 4th International CISCEM in Saarbrücken, Germany

Meet GETec at the Conference on In-situ and Correlative Electron Microscopy. On wednesday Chris Schwalb will be giving a talk about interactive correlative in-situ analysis on the nanoscale by combination of AFM and SEM. Meet us there and let’s discuss your application!

2018, October 3-5: 26th International Conference on Materials and Technology in Portorož, SI

With AFSEM®, SEM and AFM can be combined to conduct a correlative, in situ analysis of a variety of different materials. Visit us at our booth to find out how it can benefit your application.    

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AFSEM® users about our product…

“Constantly, applications and challenges arise for which the AFSEM is not only practical, but essential. That starts with direct correlation of specific particles or structures and ends with vacuum conditions as prerequisite, such as thermal measurements. Furthermore, the AFSEM accelerates the work-flow and therefore increases the efficiency for many studies.”

Assistant Professor Dr. Harald Plank, University of Technology Graz

The high spatial resolution of AFSEM, especially in Z direction, strongly stretched the application of our SEM. Combined with the high angle resolution of EBSD, the AFSEM becomes a powerful tool for the research of phase transformation.”

“What was really convincing to us is the huge versatility of this combination of an Atomic Force Microscope with our excellent optical microscope for our challenging materials and problems. We simply can use real life specimen without big preparation.”

DI Herfried Lammer, Wood K plus
olivia moser

“AFSEM® not only extends the resolution of our microscopes by an order of magnitude, it extends our measurement capabilities beyond topography concerning material composition.”

Dr. Olivia Moser, Wood K plus

“Thanks to the AFSEM we can now perform in situ investigations in our FIB microscope, which were not possible before. Especially the possibility to immediately control the result of your nanofabrication experiment is a real benefit!”

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