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AFSEM® — AFM in-situ SEM

Two microscopes are better than one

GETec Microscopy offers innovative Atomic Force Microscopy solutions for seamless integration into existing host systems like Scanning Electron Microscopes. In partnership with our customers, we develop dedicated nano analysis tools based on pre-engineered modules.

AFSEM® is an AFM by GETec Microscopy, designed for integration into an SEM or Dualbeam (SEM/FIB) microscope. It’s open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The complimentary image data of AFM and SEM enable unique characterization of your sample.

Learn more about AFSEM®

What is your Application?

Latest News

2018, August 5-9: Microscopy & Microanalysis Meeting in Baltimore

GETec will be presenting various posters, which take a closer look at novel experiments, that can be conducted using the AFSEM®. Furthermore we will be present at the booth of Quantum Design and would be happy to discuss with you, how AFSEM® can benefit your application. Find out more...

2018, July 10-13: 7th FEBIP in Modena, Italy

The 7th International Workshop on Focused Electron Beam-Induced Processing, will be held in Modena (Italy) from 10 to 13 of July 2018. GETec is proud to be a gold sponsor at the FEBIP workshop in Modena. Chris Schwalb will give a presentation on July 11th highlighting the AFSEM benefits for applications in the field of focused electron beam-induced processing. Let [...]

2018, June 19-20: 2nd EuFN Workshop in Grenoble, France

This event is organized by the European FIB network and is expecting participants from all over Europe. It is an opportunity to share knowledge and experience in the field of Focused Ion Beam. GETec will be presenting the AFSEM® and the unique benefits it can provide for your FIB system. Please visit us at our booth and learn more about [...]

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AFSEM® users about our product…

“Constantly, applications and challenges arise for which the AFSEM is not only practical, but essential. That starts with direct correlation of specific particles or structures and ends with vacuum conditions as prerequisite, such as thermal measurements. Furthermore, the AFSEM accelerates the work-flow and therefore increases the efficiency for many studies.”

Assistant Professor Dr. Harald Plank, University of Technology Graz

The high spatial resolution of AFSEM, especially in Z direction, strongly stretched the application of our SEM. Combined with the high angle resolution of EBSD, the AFSEM becomes a powerful tool for the research of phase transformation.”

“What was really convincing to us is the huge versatility of this combination of an Atomic Force Microscope with our excellent optical microscope for our challenging materials and problems. We simply can use real life specimen without big preparation.”

DI Herfried Lammer, Wood K plus
olivia moser

“AFSEM® not only extends the resolution of our microscopes by an order of magnitude, it extends our measurement capabilities beyond topography concerning material composition.”

Dr. Olivia Moser, Wood K plus

“Thanks to the AFSEM we can now perform in situ investigations in our FIB microscope, which were not possible before. Especially the possibility to immediately control the result of your nanofabrication experiment is a real benefit!”

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